Abstract
This chapter introduces the readers to the diffusion process of doping
intrinsic silicon. It discusses Fick’s Law of diffusion in-depth and the different types
of diffusion that may be observed. Towards the latter part of the chapter, the diffusion
process in semiconductors has been discussed in detail, explaining the diffusion-assisted doping process commonly employed for semiconductors, especially silicon
Keywords: Fick’s Law, Interstitial, Vacancy, Diffusion flux, Steady-state diffusion, Drive-in diffusion.
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