Abstract
This chapter introduces silicon as an electronic material for microelectronic
device fabrication. It discusses, in-depth, the various aspects of crystalline silicon,
wafer manufacturing and their identification techniques. Finally, the various steps
involved in a microfabrication process are also discussed. From this chapter, the
readers are expected to learn how to process a silicon wafer successfully and proceed
with customized device fabrication.
Keywords: Silicon, Microfabrication, Crystal, Miller indices, Ingot, Wafers.
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