Title:The Advanced Aluminum Nitride Synthesis Methods and Its Applications: Patent Review
Volume: 10
Issue: 2
Author(s): Roman A. Shishkin, Andrey A. Elagin, Ekaterina S. Mayorova and Askold R. Beketov
Affiliation:
Keywords:
Aluminum, application, carbothermal, chemical purity, CVD, direct nitridation, gas-phase synthesis, nitride, reduction,
synthesis, thermal conductivity.
Abstract: Background: High purity nanosized aluminum nitride synthesis is a current issue for both
industry and science. However, there is no up-to-date review considering the major issues and the
technical solutions for different methods. This review aims to investigate the advanced methods of
aluminum nitride synthesis and its development tendencies. Also the aluminum nitride application patents
and prospects for development of the branch have been considered.
Methods: The patent search on “aluminum nitride synthesis” has been carried out. The research activity
has been analyzed. Special attention has been paid to the patenting geography and the leading researchers in aluminum nitride
synthesis.
Results: Aluminum nitride synthesis methods have been divided into 6 main groups, the most studied approaches are carbothermal
reduction (88 patents) and direct nitridation (107 patents). The current issues for each group have been analyzed;
the main trends are purification of the final product and nanopowder synthesis. The leading researchers in aluminum
nitride synthesis have represented 5 countries, namely: Japan, China, Russia, South Korea and USA. The main aluminum
nitride application spheres are electronics (59,1 percent of applications) and new materials manufacturing (30,9
percent).
Conclusion: The review deals with the state of the art data in nanosized aluminum nitride synthesis, the major issues and
the technical solutions for different synthesis methods. It gives a full understanding of the development tendencies and of
the current leaders in the sphere.