Title:Development of Micro/Nano Pattern Arrays with Grating-Based Periodic Structures using the Direct Laser Lithography System
Volume: 21
Issue: 1
Author(s): Rency Rajan, Alfred Kirubaraj*, Senith Samson, Shajin Prince and S.R. Jino Ramson
Affiliation:
- Department of ECE, Karunya Institute of Technology and Sciences, Karunya Nagar, India
Keywords:
Laser interference, Direct Laser Lithography System (DLLS), Micro/nano patterns, Depth of Focus (DOF), Depth of Penetration (DOP), optoelectronics.
Abstract:
Introduction: This research delves into utilizing the Direct Laser Lithography System
to produce micro/nanopattern arrays with grating-based periodic structures. Initially, refining the
variation in periodic structures within these arrays becomes a pivotal pursuit. This demands a
deep comprehension of how structural variation aligns with specific applications, particularly in
photonics and material science.
Methods: Advancements in hardware, software, or process optimization techniques hold potential
for reaching this objective. Using an optical beam, this system enables the engraving of
moderate periodic and quasi-periodic structures, enhancing pattern formation in a threedimensional
environment. Through cost-effective direct-beam interferometry systems utilizing
405 nm GaN and 290 to 780 nm AlInGaN semiconductor laser diodes, patterns ranging from in
period were created, employing 300 nm gratings.
Results: The system's cost-efficiency and ability to achieve high-resolution permit the creation
of both regular and irregular grating designs. By employing an optical head assembly from a
blu-ray disc recorder, housing a semiconductor laser diode and an objective lens with an NA of
0.85, this system displays promising potential in progressing the fabrication of micro/
nanopattern arrays.
Conclusion: Assessing their optical, mechanical, and electrical properties and exploring potential
applications across varied fields like optoelectronics, photovoltaics, sensors, and biomedical
devices represent critical strides for further exploration and advancement.
