Title:Sputtering Heterogeneous Tungsten Carbide Targets by Light Ions
Bombardment
Volume: 1
Author(s): Vladimir Manukhin*
Affiliation:
- Department of General Physics and Nuclear Fusion, Institute of Thermal and Nuclear Power Engineering, National
Research University "MPEI", 111250, Moscow, Russia
Keywords:
Modified surface, light ion bombardment, layered surface, metal carbide, sputtering yield, preferential sputtering.
Abstract:
Background: This paper presents a model for sputtering heterogeneous two-component
materials with light ions.
Method: The model, based on two sputtering mechanisms, makes it possible to calculate the total
sputtering coefficients of the target components, and it is easily transformed for the case of sputtering
different types of targets. Model testing was conducted for the case of sputtering homogeneous
tungsten carbide targets with ions of different energies.
Results: The results of the calculations are given in comparison with experimental data and the
results of computer simulation. The comparison shows good agreement of the calculated values
with the data of other authors. The proposed model was used to describe stationary (stoichiometric)
sputtering of tungsten carbide targets. Using this model, the concentrations of components
in the modified target layer were calculated, and the thickness of the modified layer was also estimated.
Conclusion: The method of calculating the concentration of target components in the modified
layer and the thickness of this layer can be the basis of the technology of creating materials with
given properties of the surface layer.
