This Chapter briefly describes the methods, which are employed to study a nano-material (
structural and chemical analysis). Such methods as AFM (an atomic force microscopy), STM (a
scanning tunneling microscopy), XRD, SIMS, mechanical tests, which are employed to study a nanomaterial
(measurements of a nanohardness and an elastic modulus), are considered.
Keywords: TEM, STM, AFM, SIMS, RBS, nanohardness.
