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Recent Patents on Nanotechnology

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ISSN (Print): 1872-2105
ISSN (Online): 2212-4020

Research Article

Investigations on Cylindrical Surrounding Double-gate (CSDG) Mosfet using ALXGA1-XAS/INP: PT with LA2O3 Oxide Layer for Fabrication

Author(s): Naveenbalaji Gowthaman* and Viranjay M. Srivastava

Volume 18, Issue 3, 2024

Published on: 19 June, 2023

Page: [374 - 385] Pages: 12

DOI: 10.2174/1872210517666230427163447

Price: $65

Abstract

Background/Introduction: The Cylindrical Surrounding Double-Gate MOSFET has been designed using Aluminium Gallium Arsenide in its arbitrary alloy form alongside Indium Phosphide with Lanthanum Dioxide as a high-ƙ dielectric material.

Objective: To conduct research on the novel application of AlxGa1-xAs/InP: Pt with La2O3 oxide layer in the fabrication of Cylindrical Surrounding Double-gate (CSDG) MOSFET, with the ultimate goal of obtaining patentable findings and developing intellectual property in the field. The heterostructure based on the AlxGa1-xAs/InP: Pt has been used in the design and implementation of the MOSFET for RF applications. Platinum serves as the gate material, which has higher electronic immunity toward the Short Channel Effect and highlights semiconductor properties. The charge buildup is the main concern in the field of MOSFET design when two different materials are considered for fabrication.

Methods: The usage of 2 Dimensional Electron Gas has been outstanding in recent years to help the electron buildup and charge carrier accumulation in the MOSFETs regime. Device simulation used for the smart integral systems is an electronic simulator that uses the physical robustness and the mathematical modeling of semiconductor heterostructures. In this research work, the fabrication method of Cylindrical Surrounding Double Gate MOSFET has been discussed and realized. The scaling down of the devices is essential to reduce the area of the chip and heat generation. By using these cylindrical structures, the area of contact with the circuit platform is reduced since the cylinder can be laid down horizontally.

Results: The coulomb scattering rate is observed to be 18.3 % lower than the drain terminal when compared to the source terminal. Also, at x = 0.125 nm, the rate is 23.9 %, which makes it the lowest along the length of the channel; at x = 1 nm, the rate is 1.4 % lesser than that of the drain terminal. A 1.4 A/mm2 high current density had been achieved in the channel of the device, which is significantly larger than comparable transistors.

Conclusion: The findings of this study reveal that the proposed cylindrical structures transistor, compared to the conventional transistor, not only occupies a smaller area but also demonstrates enhanced efficiency in RF applications. These results suggest the potential for patentable innovations in the field of transistor design and fabrication, offering opportunities for intellectual property development and commercialization.

Keywords: Arbitrary alloys, high-ƙ dielectrics, microelectronics, nanomaterials, semiconductors, low power/energy, CSDG MOSFET, VLSI.

Graphical Abstract
[1]
Isabona J, Srivastava VM. Downlink massive MIMO systems: Achievable sum rates and energy efficiency perspective for future 5G systems. Wirel Pers Commun 2017; 96(2): 2779-96.
[http://dx.doi.org/10.1007/s11277-017-4324-y]
[2]
Austin T, Blaauw D, Mudge T, et al. Leakage current: Moore’s law meets static power. Computer 2003; 36(12): 68-75.
[http://dx.doi.org/10.1109/MC.2003.1250885]
[3]
Renault O, Samour D, Rouchon D, et al. Interface properties of ultra-thin HfO2 films grown by atomic layer deposition on SiO2/Si. Thin Solid Films 2003; 428(1-2): 190-4.
[http://dx.doi.org/10.1016/S0040-6090(02)01198-7]
[4]
Norris DJ, Walther T, Cullis AG, et al. TEM analysis of Ge-on-Si MOSFET structures with HfO2 dielectric for high-performance PMOS device technology. 16th Int Conf on Microscopy of Semiconducting Materials. Oxford, UK. 2009; p. Volume 209: 012061.
[5]
Liu JW, Oosato H, Da B, Koide Y. Fixed charges investigation in Al2O3/hydrogenated-diamond metal-oxide-semiconductor capacitors. Appl Phys Lett 2020; 117(16): 163502.
[http://dx.doi.org/10.1063/5.0023086]
[6]
Gowthaman N, Srivastava VM. Parametric Analysis of CSDG MOSFET With La2O3 gate oxide: Based on electrical field estimation. IEEE Access 2021; 9: 159421-31.
[http://dx.doi.org/10.1109/ACCESS.2021.3131980]
[7]
Paramasivam P. Gowthaman, Naveenbalaji; Srivastava, Viranjay M. Design and analysis of InP/InAs/AlGaAs based Cylindrical Surrounding Double-Gate (CSDG) MOSFETs with La2O3 for 5-nm technology. IEEE Access 2021; 9: 159566-76.
[http://dx.doi.org/10.1109/ACCESS.2021.3131094]
[8]
Lin J, Liu H, Wang S, Wang D, Wu L. The image identification application with HfO2-based replaceable 1T1R neural networks. Nanomaterials 2022; 12(7): 1075.
[http://dx.doi.org/10.3390/nano12071075] [PMID: 35407193]
[9]
Suzuki R, Taoka N, Yokoyama M, et al. 1-nm-capacitance-equivalent-thickness HfO2/Al2O3/InGaAs metal-oxide-semiconductor structure with low interface trap density and low gate leakage current density. Appl Phys Lett 2012; 100(13): 132906.
[http://dx.doi.org/10.1063/1.3698095]
[10]
Galatage RV, Dong H, Zhernokletov DM, et al. Effect of post deposition anneal on the characteristics of HfO2/InP metal-oxide-semiconductor capacitors. Appl Phys Lett 2011; 99(17): 172901.
[http://dx.doi.org/10.1063/1.3656001]
[11]
Gowthaman N, Srivastava VM. Capacitive modeling of cylindrical surrounding double-gate MOSFETs for hybrid RF applications. IEEE Access 2021; 9: 89234-42.
[http://dx.doi.org/10.1109/ACCESS.2021.3090956]
[12]
Gowthaman N, Srivastava VM. InP/AlGaAs Based CSDG MOSFET with Au/Pt gate materials for high frequency/hybrid applications. XXX International Scientific Conference Electronics (ET). Sozopol, Bulgaria. 2021; pp. 1-5.
[http://dx.doi.org/10.1109/ET52713.2021.9579736]
[13]
Walther T. Measurement of nanometre-scale gate oxide thicknesses by energy-dispersive X-ray spectroscopy in a scanning electron microscope combined with Monte-Carlo simulations. Nanomaterials 2021; 11(8): 2117.
[http://dx.doi.org/10.3390/nano11082117] [PMID: 34443947]
[14]
Zhang J, Wu Y, Yang G, et al. Optimization of sacrificial layer etching in single-crystal silicon nano-films transfer printing for heterogeneous integration application. Nanomaterials 2021; 11(11): 3085.
[http://dx.doi.org/10.3390/nano11113085] [PMID: 34835848]
[15]
Zhu H, Jang J, Im G, Mok H, Ryu J, Kim KS. Investigation of the pulsing characteristic of a carbon nanotube emitter. Nanomaterials 2022; 12(3): 522.
[http://dx.doi.org/10.3390/nano12030522] [PMID: 35159868]
[16]
Lu J, He G, Yan J, et al. Interface optimization and transport modulation of Sm2O3/InP metal oxide semiconductor capacitors with atomic layer deposition-derived laminated interlayer. Nanomaterials 2021; 11(12): 3443.
[http://dx.doi.org/10.3390/nano11123443] [PMID: 34947792]
[17]
Mao S, Gao J, He X, et al. Low-temperature (≤ 500°C) complementary Schottky source/drain FinFETs for 3D sequential integration. Nanomaterials 2022; 12(7): 1218.
[http://dx.doi.org/10.3390/nano12071218] [PMID: 35407340]
[18]
Lee J. Unified model of shot noise in the tunneling current in sub-10 nm MOSFETs. Nanomaterials 2021; 11(10): 2759.
[http://dx.doi.org/10.3390/nano11102759] [PMID: 34685204]
[19]
Ganem JJ, Trimaille I, Vickridge IC, Blin D, Martin F. Study of thin hafnium oxides deposited by atomic layer deposition. Nucl Instrum Methods Phys Res B 2004; 219-220: 856-61.
[http://dx.doi.org/10.1016/j.nimb.2004.01.176]
[20]
Jaggernauth A, Mendes JC, Silva RF. Atomic layer deposition of high- κ layers on polycrystalline diamond for MOS devices: A review. J Mater Chem C Mater Opt Electron Devices 2020; 8(38): 13127-53.
[http://dx.doi.org/10.1039/D0TC02063J]
[21]
Staub PF. The low energy X-ray spectrometry technique as applied to semiconductors. Microsc Microanal 2006; 12(4): 340-6.
[http://dx.doi.org/10.1017/S1431927606060442] [PMID: 16842650]
[22]
Srivastava VM, Yadav KS, Singh G. Double pole four throw switch design with CMOS inverter. 5th IEEE Conf on Wireless Communication and Sensor Networks. India. 2009; pp. 1-4.
[http://dx.doi.org/10.1109/WCSN.2009.5434786]
[23]
Jia X, He L. Research of shot noise based on realistic nano-MOSFETs. AIP Adv 2017; 7(5): 055202.
[http://dx.doi.org/10.1063/1.4979885]
[24]
Jonghwan Lee, Bosman G, Green KR, Ladwig D. Model and analysis of gate leakage current in ultrathin nitrided oxide MOSFETs. IEEE Trans Electron Dev 2002; 49(7): 1232-41.
[http://dx.doi.org/10.1109/TED.2002.1013281]
[25]
Taur Y, Wu J, Min J. Dimensionality dependence of TFET performance down to 0.1 V supply voltage. IEEE Trans Electron Dev 2016; 63(2): 877-80.
[http://dx.doi.org/10.1109/TED.2015.2508282]
[26]
Tanaka H, Suda J, Kimoto T. Analysis of ballistic and quasi-ballistic hole transport properties in germanium nanowires based on an extended “Top of the Barrier” model. Solid-State Electron 2016; 123: 143-9.
[http://dx.doi.org/10.1016/j.sse.2016.04.015]
[27]
Robertson J, Wallace RM. High-K materials and metal gates for CMOS applications. Mater Sci Eng Rep 2015; 88: 1-41.
[http://dx.doi.org/10.1016/j.mser.2014.11.001]
[28]
Gowthaman N, Srivastava VM. Analysis of Nanometer-Scale n-Type Double-Gate (DG) MOSFETs Using High-ƙ Dielectrics for High-Speed Applications. 2021 44th International Spring Seminar on Electronics Technology (ISSE). Bautzen, Germany. 2021; p. 1-5.
[http://dx.doi.org/10.1109/ISSE51996.2021.9467619]
[29]
Li G, Song E, Guo Q, Huang G, Mei Y. Transfer techniques for single-crystal silicon/germanium nanomembranes and their application in flexible electronics. Sci Sinica Informat 2018; 48(6): 670-87.
[http://dx.doi.org/10.1360/N112018-00084]
[30]
Zhang J, Wu Y, Li Z, et al. High-performance acetone soluble tape transfer printing method for heterogeneous integration. Sci Rep 2019; 9(1): 15769.
[http://dx.doi.org/10.1038/s41598-019-52235-0] [PMID: 31673059]
[31]
Zhang J, Zhang W, Wu Y, et al. Wafer-scale Si–GaN monolithic integrated E-Mode Cascode FET realized by transfer printing and self-aligned etching technology. IEEE Trans Electron Dev 2020; 67(8): 3304-8.
[http://dx.doi.org/10.1109/TED.2020.3001083]
[32]
Zhang J, Zhang Y, Chen D, et al. Bendable single crystal silicon nanomembrane thin film transistors with improved low-temperature processed metal/n-Si ohmic contact by inserting TiO2 interlayer. Nanomaterials 2018; 8(12): 1060.
[http://dx.doi.org/10.3390/nano8121060] [PMID: 30558367]
[33]
Fu Y, Xu Y, Xu R, Zhou J, Kong Y. Physical-based simulation of DC characteristics of hydrogen-terminated diamond MOSFETs. 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium (EDAPS). 2017; p. 1-3.
[34]
Di Bartolomeo A, Pelella A, Urban F, et al. Field emission in ultrathin PdSe2 back-gated transistors. Adv Electron Mater 2020; 6(7): 2000094.
[http://dx.doi.org/10.1002/aelm.202000094]
[35]
Mahata C, Oh IK, Yoon CM, et al. The impact of atomic layer deposited SiO2 passivation for high-k Ta1−x ZrxO on the InP substrate. J Mater Chem C Mater Opt Electron Devices 2015; 3(39): 10293-301.
[http://dx.doi.org/10.1039/C5TC01890K]
[36]
Lebedev MV, Serov YM, Lvova TV, Endo R, Masuda T, Sedova IV. InP(100) surface passivation with aqueous sodium sulfide solution. Appl Surf Sci 2020; 533147484.
[http://dx.doi.org/10.1016/j.apsusc.2020.147484]
[37]
a) Srivastava V. Signal processing for wireless communication MIMO system with nano-scaled CSDG MOSFET based DP4T RF Switch. Recent Pat Nanotechnol 2015; 9(1): 26-32.
[http://dx.doi.org/10.2174/187221050901150311100954] [PMID: 25986227];
b) Winkler J. Methods for operating a silicon carbide, SiC, Mosfet assembly, and device. WO Patent 2021223816A1, 2021.
[38]
Vivet P, Thuriès S, Billoint O, et al. Monolithic 3D: An alternative to advanced CMOS scaling, technology perspectives, and associated design methodology challenges. 25th IEEE International Conference on Electronics, Circuits, and Systems (ICECS). Bordeaux, France. 2018; pp. 157-60.
[http://dx.doi.org/10.1109/ICECS.2018.8617955]

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